HYT 70XE

Vacuum Particle Sensor


	Highly reliable and versatile. Provides continuous feedback during critical processing steps when used with an HYT controller. Real-time feedback enables a timely response to possible process deviations. Rugged, modular design Protected optics withstand corrosive or depositing effluents found in LPCVD processes.

Specifically designed for in situ particle monitoring (ISPM) Use with an HYT controller Integrate into large pump line configurations.