DI & UPW plant

The Hach Ultra ANATEL TOC Analyzers are the recognized industry standard to meet the organic contamination monitoring needs of today's ultrapure water systems. ANATEL TOC analyzers excel at accuracy and repeatability at less than 1-3 ppb in accordance with the Industry Technology Roadmap for Semiconductors (ITRS) roadmap TOC levels.

Hach Ultra products cover a wide range of UPW on-line analytics. With shrinking device geometries, engineers require decreasing particle levels in process fluids.The Hach Ultra range of on line UPW particle monitors are designed to meet the ITRS guidelines for ultra-low particle concentrations.

Hach Ultra ORBISPHERE electrochemical sensors for dissolved oxygen monitoring in electronics UPW facilities are the premier choice for fast, accurate oxygen measurement. ORBISPHERE sensors are designed to meet the most stringent measurement requirements with outstanding reputation for reliability and low maintenance. Sensors combine with ORBISPHERE controllers for powerful, accurate and practical gas measurement solutions for UPW engineers in semiconductor and flat panel display manufacturing.

Products
ORBISPHERE A1100 Oxygen Sensor
Simply Accurate
  • Sensor refurbishment in 3 minutes with pre-filled recharge cartridge* (*patent-pending)
  • Unique design allows for extended period between recharges
  • Unrivalled accuracy and response time for fast detection of process change
Polymetron 9100 POLYMETRON 9125
Conductivity Transmitter
  • Easy to use with large clear display and simple programming
  • 2 smart analog outputs: 0/4 to 20mA
  • Options of relay outputs, RS485 output and NEMA 4X (~IP66) protection
HIAC 2000 HIAC 2000
Liquid Particle Counter
  • Up to four channels of particle size information
  • Ideal for point of use and online applications.
  • Interfaces with HIAC MicroCount submicron and HRLD laser sensors.
POLYMETRON 9126 Purecal
Conductivity Monitor
  • User friendly, compact and portable
  • Highly accurate validation of pure and ultrapure conductivity measurements.
  • Certificate of conformity to ASTM and NIST
ANATEL A-1000
TOC Analyzer
  • Detection limits from 0.05 to 1999 ppb TOC
  • Patented stopped flow and photocatalytic oxidation
  • Convenient serial, analog, and digital interfacing
Anatel A-4000 ANATEL A-4000
Online TOC Analyzer
  • Reports TOC values within 3 minutes
  • Ranges vary from 2,500 to 50,000 ppb
  • Detection limits less than 5 ppb
Anatel A-1000 XP ANATEL A-1000 XP
Portable TOC Analyzer
  • Patented stopped flow and photocatalytic oxidation
  • Handles capacities of thousands of liters per minute
  • Maintain TOC levels at less than 1-3 ppb
Click to enlarge image ORBISPHERE 510 Multi Channel
O2, O3, CO2, N2 and H2 Gas Analyzer – Providing quality process monitoring in liquid or gas phases
  • Up to 3 sensors using electrochemical or thermal conductivity technologies reducing cost of installation and ownership
  • High level accuracy, rapid response time and selective gas measurement gives reliable and effective process monitoring
  • Thermal cut-off offers a longer life span for all ORBISPHERE sensors during CIP/abnormal high temperature conditions
ORBISPHERE 410
O2 and O3 Gas Analyzer
  • Accurate O2 or O3 measurement
  • Robust stainless steel enclosure
  • Single channel online instrument
ORBISPHERE 3650/3655
O2 or Dissolved O2 Portable Gas Analyzer
  • Waterproof, super-sturdy, lightweight O2 or dO2 analyzer
  • Works with an Orbisphere patented electrochemical sensor
  • No warm up necessary for accurate measuring
POLYMETRON 9135
pH Transmitter
  • Auto calibration in standard buffers.
  • 0 to 20mA or 4 to 20mA outputs
  • Bi-directional proportional controller for pulse contact or frequency output
POLYMETRON 8362
pH Pure Water Sensor
  • Specially designed and tested for ultra pure water applications
  • Easy installation, maintenance and calibration
  • Pt100 and 3 meters of cable included
POLYMETRON 8315/16/17
Conductivity Sensor
  • Fast response time
  • Built in temperature sensor
  • Wide measuring range
POLYMETRON 8310/11/12
Conductivity Sensor
  • Accuracy tests according to ISO 7888 and ASTM D 1125
  • Fast response time
  • Built-in Pt100 temperature sensor
Anatel Ultrapure-50 ANATEL Ultrapure-50
Liquid Particle Counter
  • 0.05 and 0.1 micron monitoring
  • Measures in significantly low concentrations
  • Low false count rate at an affordable price
Anatel Ultrapure 100 ANATEL Ultrapure-100
Liquid Particle Counter
  • 0.1 and 0.2 micron monitoring
  • Measures in significantly low concentrations
  • Low false count rate at an affordable price
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