Vacuum Particle Monitors

HYT 20SXG Probe Sensor
Vacuum Particle Sensors
  • High power laser diode for 0.19 micron sensitivity and large detection area
  • 20SXG: Ultra compact probe design for installation in restricted spaces
  • 25SXG: Mount directly within a chamber or process module for in-chamber monitoring
HYT PM-250 Series
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle
Process Instruments
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