HYT

Vacuum Particle Counting
Inventors of in situ monitoring

Hach Ultra continues a legacy of innovation with HYT vacuum particle count systems. As the first to offer in situ particle monitoring (ISPM) for semiconductor process equipment, HYT brand monitoring solutions continue to lead the industry.

HYT products offer real time, continuous monitoring to rapidly identify particle sources and identify intermittent events, as well as automatic process control: no operators, monitor wafers, or downtime for process checks.

See Also
HYT 20SXG Probe Sensor
Vacuum Particle Sensors
  • High power laser diode for 0.19 micron sensitivity and large detection area
  • 20SXG: Ultra compact probe design for installation in restricted spaces
  • 25SXG: Mount directly within a chamber or process module for in-chamber monitoring
HYT PM-250 Series
Vacuum Particle Controller
  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle
Press Releases
 
Upcoming Events
 
Articles
 
DANAHER.COM