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Electronics

MET ONE and HIAC particle counters are specifically designed to meet the needs of the Electronics industry. From cleanroom monitoring of air particles to ISO 14644 and ISO 21501, to aqueous parts cleaning and ultrapure water monitoring, MET ONE and HIAC particle counters will drive high yields in the Semiconductor, Flat Panel Display and HDD industries.

Flat Panel Industry

Air Products:

Cleanroom environmental monitoring particle counting products
ISO 14644 cleanroom and controlled environments classification and validation

Liquid Products:

Aqueous parts cleaning
De-ionized (DI) water particle monitoring
  • HIAC UP100 liquid particle counter
Ultrapure water particle monitoring for flat panel production
  • HIAC UP100 liquid particle counter
Ultrapure water particle monitoring for flat panel production
  • HIAC UP100 liquid particle counter
Cleanroom environmental monitoring particle counting products
Cleanroom and controlled environments classification and validation
Aqueous parts cleaning
De-ionized (DI) water particle monitoring
Ultrapure water particle monitoring for flat panel production
  • International Organization for Standards (ISO)
  • ISO 14644 Cleanrooms and associated controlled environments
  • ISO 21501-4 Determination of particle size distribution - Light scattering airborne particle counters for clean spaces
  • The Institute of Environmental Sciences and Technology (IEST)
  • Association Connecting Electronics Industries (IPC)
  • British Standards Institution (BSI)
  • Electronic Industries Alliance (EIA)
  • Global Semiconductor Alliance
  • International Society of Automation (ISA)
  • Korea Semiconductor Industry Association (KSIA)
  • Taiwan Semiconductor Industry Association (TSIA)
  • Semiconductor Industry Association (SIA)
  • Semiconductor Equipment Association of Japan (SEAJ)
Q. What is the recommended frequency of air particle counter calibration?
A. ISO 14644-1 requires regular calibration of air particle counter instruments for use in all cleanrooms.  To ensure particle count accuracy and reliability is maintained we recommend calibration every 6 months.
Q. Where in my facility should I locate airborne particle counters to ensure effective monitoring?
A. ISO 14644-1 does not offer requirements or advice on counter location but it does recommend both monitoring as close to critical processes as possible and sampling in high traffic areas. Generally this means only in those areas where product is being processed and therefore quality may be affected by environmental conditions.
Q. How will viscous and colored chemistry affect liquid particle counts?
A. Viscosity is only important if it impacts maintaining proper flow rate.  HIAC liquid particle counters are designed with wide viscosity ranges and optimized flow control to ensure accurate measurements and industry leading reliability.  The liquid’s color can affect counting if it absorbs the wavelength of laser light used in the liquid optical particle counter.
Q. In gowning rooms, what is the suitable height to monitor with an airborne particle counter?
A. Sample probes should be located 1.5m =/-10% from the floor.