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MET ONE 3411
MET ONE 3411 portable air particle counters are designed specifically for semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications. With industry leading ISO 21501 accuracy and reproducibility, the MET ONE 3411 is the cleanest 0.1um portable air particle counter in the market.
Benefits of selecting the MET ONE 3411 portable air particle counter
Keeps your cleanroom clean
The only 0.1um particle counter without a dirty exhaust fanHot-swappable batteries –100% instrument availability
Hot-swappable batteries eliminate the need stop measuring while your instrument charges or for powering down, zero counting and powering back upTest Wizard for easier compliance - organize your cleanroom
Save time and eliminate errors when monitoring your semiconductor production environments.Sequential sampling - manifold system
Low cost site monitoring solutions can be deployed with the MET ONE Model 3432 manifold. Sample sequentially from up to 32 locations with a single MET ONE Model 3411 series particle counter.Flexible Communications – easy setup and data transfer
Reduce your paperwork with wireless, Ethernet and serial communication options to MET ONE Data Management or your own software solutionsIntuitive user interface
Easily set up sampling plans by area, location and operating parameter, saving operator time. Eliminate setup errors and save time by exporting setup configuration to USB memory stick and deploy your sampling plan across your entire particle counting fleet!ISO 21501-4 reliability and accuracy
Designed for exceptional particle counting performance providing ISO 21501-4 compliant unit-to-unit accuracy and reproducibility| Number of Size Channels | 8 |
| Particle Sizes | 0.1, 0.2, 0.3, 0.5, 1.0, 5.0µ |
| Light Source | Helium Neon Laser |
| Weight | Without battery: 15.9 kg (35 lbs), Battery: 0.66 kg (1.45 lbs) |
| Dimensions | 33 W x 55.9 D x 22.9 H cm (13 x 22 x 9 inches) |
| Enclosure | Easy to clean Stainless Steel |
| Flow Rate | 1.0 CFM (28.3 LPM) |
| Zero Count | ISO 21501-4 and JIS B 9921: 1 count or less in 5 minutes, 95% UCL |
| Coincidence Loss | 5% at 50,000 /ft3 per ISO 21501-4 method |
| Pump | Patented multi-lobe closed loop controlled rated for continuous use |
| Counting Efficiency | 50% at 0.1 μm; 100% for particles > 0.15 μm per ISO 21501-4 and JIS B 9921 |
| Operating Temperature | 10° to 40°C (50° to 104°F); 10 to 90% relative humidity, non-condensing |
| Display | ¼ VGA Color TFT touch screen |
| Printer | High speed thermal |
| Language | English, French, German, Italian, Spanish, Korean*, Japanese*, Chinese |
| Maximum Count Displayed | 9,999,999 displayed |
| Delay Time | 15 seconds to 23 hours 59 minutes 59 seconds |
| Sample/Hold Times | 1 second to 23 hours 59 minutes 59 seconds |
| Count Alarms | 1 to 9,999,999 counts |
| Locations | ID: 0 to 999; NAME: Alphanumeric, appears on printout |
| Data Storage | 5,000 samples, scrollable on Historical Data review screen (FIFO or Overflow) |
| Outputs | USB Client (Version 1.1) USB Host (Version 1.1) RS-485 Ethernet with TCP/IP protocol Wireless with 802.11g protocol (optional) Met One 3432 manifold Auxiliary (alarm and scan probe) |
| Communication Protocol | Modbus TCP , Modbus RTU , Serial FX |
| Inputs | Air Velocity Probe, RH/Temperature Probe |
| Auto CDA Purge | Purge solenoid activated by connection to Clean Dry Air source |
| Power | 24 VDC with 100-240 VAC, 50/60 Hz adapter |
| Battery Type | Lithium ion smart battery; rechargeable, ejectable, and hot-swappable |
| Battery Operating Time | 3 hours minimum |
| Battery Recharge Time | 6.75 hours minimum, 10 hours maximum |
| Battery Quantity Included | 2 each |
| Name | Type | Language | Date |
|---|---|---|---|
| MET ONE 3411 Series Brochure US | English | 23 Nov 2011 | |
| MET ONE-Portable-Air-Particle-Counter-3411-Series-Manual | English | 23 Nov 2011 | |
| MET ONE 3411 Series Brochure UK | English A4 | 28 Nov 2011 |
Accessories included with the MET ONE 3411 Portable Air Particle Counter
| Part Number | Description |
|---|---|
| 2087966-01 | Isokinetic probe 1.00 CFM nickel plated aluminum 3/8” barbed fitting |
| 960380 | Tubing, sample, 3/8” ID, 10 ft |
| 2088035-01 | IsokineticProbe adapter, aluminum |
| 970650 | Tripod for Isokinetic-Probe |
| 230-300-7052 | Power Supply 24VDC output |
| VP623500 | AC Power Cord, 72", 230V, BLACK |
| VP623501 | Power Cord: 115VAC, 6' L |
| 2087939-01 | Zero count filter 1CFM |
| 2087090 | PortAll software, CD |
| 460519 | Printer paper, 2 rolls |
| 280-120-2024 | 2 x Battery pack, Lithium Ion |
| 210-400-5171 | Touch screen stylus |
| 2088010-01 | USB memory drive 128M |
| 410-150-0011 | 3 pin mini terminal block |
| 410-420-0020 | Back shell for 410-150-0011 |
| 490-200-0001 | Wireless Antenna Included with wireless version P/N 2088800-02 |
Optional Accessories for the MET ONE 3411 Portable Air Particle Counter |
|
| Part Number | Description |
|---|---|
| CAL_GAS_3411 | GAS CALIBRATION, He, Ar, CO2, & N2 for model 3411 |
| 701241-01 | IQ/OQ 3400 series Validation Documents (CD) |
| 2087966-02 | Isokinetic Probe, 1.0 CFM Stainless Steel, 3/8” barbed fitting |
| 2089406-01 | Isokinetic-Probe Stand |
| 460519 | Printer Paper (per roll) |
| 280-300-5000 | Smart Battery Charger |
| 280-120-2024 | Battery, Smart Lithium Ion |
| 2088928 | Temperature & Relative Humidity Probe Vaisala HMP50 |
| 2087939-01 | Zero count filter 1.0 CFM |
| 460-400-4798 | Cable, USB 2.0, Hi Speed, 1 meter |
| 2084045-02 | Particle Vision PortAll, version 2.0, Kit, download utility software, adapter and manual (serial cable must be purchased separately) |
| 700011-21 | PortAll License Standard Edition |
| 2088000-01 | Filter scanning probe (with electronics) 1 CFM |
| 2088000-02 | Filter scanning probe (without electronics) 1 CFM |
| 2088012-02 | Adapter, USB to RS-232, USB cable, DB-9 null modem and Modbus register map |
| 2088012-01 | Adapter, USB to RS-485, USB cable and Modbus register map |
| 2080732-8 | High Pressure Diffuser for use with 1.0 CFM units |
Airborne particle counting for semiconductor applications:
- Cleanroom verification monitoring
- Cleanroom classification
- ISO 14644 cleanroom verification
- Cleanroom particulate monitoring
- Sequential monitoring of manufacturing processes
- Process troubleshooting particle contamination sources
- HEPA filter leak detection across 0.1, 0.15, 0.2, 0.3, 0.5 and 1um sizes
- Filter scanning
- High pressure gas monitoring with simple gas selection menu and automatic sample flow adjustment
Airborne particle counter semiconductor standards and committees:
- International Organization for Standards (ISO)
- ISO 14644 Cleanrooms and associated controlled environments
- ISO 21501 Determination of particle size distribution - Light scattering airborne particle counters for clean spaces
- The Institute of Environmental Sciences and Technology (IEST)
| Q. | What are the benefits of embracing the ISO 21501-4 particle counter calibration standard? |
| A. | The particle counting instrument’s repeatability and reproducibility is ensured regardless of model type. |
| Q. | What is the difference between the ISO 21501-4 and traditional particle counter calibrations? |
| A. | ISO 21501-4 uses NIST traceable standard particles to perform the size calibration. Moreover, in addition to size calibration, extensive post-calibration performance tests are conducted to ensure actual particle count accuracy. |
| Q. | Will ISO 21501-4 performance be maintained over the life of the instrument? |
| A. | Yes, the ISO 21501-4 calibration is designed to be performed during the normal particle counter calibration intervals. |
| Q. | Are MET ONE 3411 portable air particle counters required to be sent to the factory for the ISO 21501-4 calibration? |
| A. | No, with the industry's largest global network of local service offices, we are the only company that can deliver fully compliant on-site service for your instruments, including full ISO 21501-4 calibrations. Each of our automated particle counting monitoring solutions report the calibration status of each instrument and proactively notify you of upcoming calibrations to ensure full service compliance of all batch production and environmental monitoring measurements. |
| Q. | Why does the MET ONE 3411 portable air particle counter use a HeNe laser? |
| A. | Helium Neon (HeNe) lasers have long been an attractive choice for airborne particle counter (APC) design. The HeNe’s output of collimated, monochromatic light, which is emitted with high optical power and uniformity, can be exploited to produce particle counters with excellent particle sensitivity and sizing resolution. Additionally, HeNe based air particle sensors require fewer optical parts resulting in reduced cost and increased reliability. |
| Q. | Is the firmware on the 3411 series upgradable? |
| A. | The MET ONE 3411’s firmware is normally updated annually to keep up with regulatory changes and to provide users with access to the latest functional enhancements. |
| Q. | Do I have to send my MET ONE 3411 portable air particle counter back to the factory for upgrades? |
| A. | No - Upgrades can easily be performed on-site by a Hach MET ONE Field Service Engineer via USB memory stick. Normally, particle size recalibration is not required. |
| Q. | Does the MET ONE 3411 portable air particle counter support sequential sampling with a manifold? |
| A. | Yes, the MET ONE 3432 Manifold with 32 ports is compatible with the MET ONE 3411 portable air particle counter. |
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